Lithographic apparatus

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August undefined, 2024

WebIn a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas … WebAn immersion lithographic apparatus includes: a projection system for projecting a patterned beam of radiation through an optical element of a final lens element of a …

Lithographic Apparatus, Device Manufacturing Method, and …

Web9. A lithographic projection apparatus arranged to project a pattern from a patterning device onto a substrate, the apparatus comprising: a substrate table configured to support a substrate and a sensor; a liquid supply system configured to provide liquid in a space between a projection system and a surface of the substrate table; and a controller … WebAn immersion lithography apparatus is disclosed in which liquid is supplied to a space between a projection system and a substrate, and a plate structure is provided to divide the space into two parts. The plate structure has an aperture to allow transmission of the projection beam, has through holes in it to reduce the damping effect of the presence of … birthday book astrology website

Stereolithography - Wikipedia

WebA lithographic apparatus is a machine that applies a desired pattern onto a target portion of a substrate. Lithographic apparatus can be used, for example, in the manufacture of … WebJP-2004006690-A chemical patent summary. WebTypical wavelengths currently in use are 365 nm (i-line), 248 nm, 193 nm and 13.5 nm. A lithographic apparatus, which uses extreme ultraviolet (EUV) radiation, having a wavelength within the range 4-20 nm, for example 6.7 nm or 13.5 nm, may be used to form smaller features on a substrate than a lithographic apparatus which uses, ... birthday bongo cat

Lithographic apparatus and device manufacturing method

Web7656502 - 11472566 - USPTO . Application Jun 22, 2006 - Publication Feb 02, 2010 Harmen Klaus Van Der Schoot Noud Jan Gilissen Peter Paul Steijaert Erik Roelof … Web9 jul. 2009 · Abstract. A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes … birthday book astrology onlineWeb摘要：A radiation source for a lithographic apparatus, in particular a laser-produced plasma source includes a fan unit surrounding but not obstructing the collected radiation … daniel whitney douglasville ga

"WebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one go, and so-called scanners, in which each target portion is irradiated by scanning the pattern through the projection beam in a given direction (the “scanning”-direction) while synchronously … " - Lithographic apparatus

Lithographic apparatus

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WebA lithographic apparatus is described, the lithographic apparatus comprising: an illumination system configured to condition a radiation beam; a support constructed to … WebLithographic projection apparatus专利检索，Lithographic projection apparatus属于·渗析专利检索，找专利汇即可免费查询专利，·渗析专利汇是一家知识产权数据服务商，提供 …

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WebA lithographic apparatus comprising a projection system configured to project a patterned radiation beam to form an exposure area on a substrate held on a substrate table, the … Web1. A lithographic apparatus arranged to project a pattern from a patterning device onto a substrate through a liquid confined in a space adjacent the substrate and along a beam path in the space, the apparatus comprising: a liquid confinement structure configured to at least partly confine the liquid in the space, the liquid confinement structure having, a liquid …

WebA lithographic apparatus comprises a substrate table (WT) to hold a substrate, a reference structure and a measurement system to measure a position of the … Web29 nov. 2012 · The lithographic apparatus component of claim 2, wherein the lithographic apparatus component is a projection system wall, a substrate table, a mirror, a heat sink …

WebThe lithographic apparatus according to claim 4, wherein the first seal, the second seal and/or third seal comprises any one or combinations of acrylic rubber, butadiene rubber, … WebFind many great new & used options and get the best deals for Vintage 1940's Marx Litho Pressed Steel Sand & Gravel Dump Truck at the best online prices at eBay! Free shipping for many products! Skip to main content. Shop by category. ... Marx Pressed Steel Diecast Dump Trucks, Marx Pressed Steel Diecast Dump Trucks,

WebIn a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas …

WebLithographic projection apparatus专利检索，Lithographic projection apparatus属于·渗析专利检索，找专利汇即可免费查询专利，·渗析专利汇是一家知识产权数据服务商，提供专利分析，专利查询，专利检索等数据服务功能。 daniel whyte deviantartWeb6 apr. 2001 · On-the-Fly leveling in a lithographic apparatus is conducted using a setpoint derived by filtering the output of the combination of the output of a level sensor and … birthday bookey deliveryWebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one go, and so-called … birthday book and candle birthday book astrology online freeWebA lithographic apparatus has a positioning system for positioning an object table, said positioning system comprising a planar motor having a stator (10) and a translator … birthday book as seen on tvWebLithography method and lithography apparatus 申请号：JP2024566192 申请日：20151210 公开号：JP6792572B6 公开日：20241223 摘要：A method includes exposing number of fields on a substrate, obtaining data about a field and correcting exposure of the field in subsequent exposures. daniel whittington bioWeb1. A lithographic apparatus arranged to project a pattern from a patterning device onto a substrate through a liquid confined in a space adjacent the substrate and along a beam … birthday boards for toddlers